6

A Novel Running-in Method for Improving Life-Time of Bulk-Fabricated Silicon MEMS Devices

Year:
2012
Language:
english
File:
PDF, 1.15 MB
english, 2012
8

Adhesive and corrosive wear at microscales in different vapor environments

Year:
2013
Language:
english
File:
PDF, 790 KB
english, 2013
9

Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices

Year:
2013
Language:
english
File:
PDF, 730 KB
english, 2013